Publications

2 results for P. Ziemann

Correlation between the ion bombardment during film growth of Pd films and their structural and electrical properties
- - P. Ziemann
  - E. Kay
- 1983
- JVSTA
Paper
A comparison of Mo films bias sputtered in Ar/N₂ with related high energy ion implantation experiments
- - E. Kay
  - P. Ziemann
- 1982
- Journal of Applied Physics
Paper