Raman spectroscopy of PtSi formation at the Pt/Si(100) interface
- J.C. Tsang
- Y. Yokota
- et al.
- 1984
- Applied Physics Letters
Paper
Publications
3 results for Y. Yokota
Chemical reaction and silicide formation at the Pt/Si interface
- R. Mate
- R.J. Purtell
- et al.
- 1984
- JVSTA
PaperRaman Spectroscopy of Silicide Formation at the Pt/Crystalline Si Interface
- J.C. Tsang
- G.W. Rubloff
- et al.
- 1984
- JVSTA
Paper