Publications

4 results for R.H. Kastl

Rapid annealing and the anomalous diffusion of ion implanted boron into silicon
- - Alwin E. Michel
  - W. Rausch
  - et al.
- 1987
- Applied Physics Letters
The poly-single crystalline silicon interface
- - C.Y. Wong
  - Alwin E. Michel
  - et al.
- 1984
- Journal of Applied Physics
Channeling in low energy boron ion implantation
- - Alwin E. Michel
  - R.H. Kastl
  - et al.
- 1984
- Applied Physics Letters
Ion-implanted polysilicon diffusion sources
- - Alwin E. Michel
  - R.H. Kastl
  - et al.
- 1983
- Nuclear Instruments and Methods In Physics Research