Publications

138 results for B.S. Meyerson

GAS/SURFACE INTERACTIONS RELEVANT TO CHEMICAL VAPOR DEPOSITION TECHNIQUES.
- - B.S. Meyerson
  - M.L. Yu
- 1983
- American Institute of Chemical Engineers Annual Meeting 1983
IN SITU DOPED SILICON VIA LPCVD: INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- - B.S. Meyerson
  - M.L. Yu
- 1983
- ECS Meeting 1983
IN-SITU DOPED SILICON VIA LPCVD; INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- - B.S. Meyerson
  - M.L. Yu
- 1983
- International Conference on Chemical Vapor Deposition 1983
AMORPHOUS HYDROGENATED SILICON SOLAR CELLS WITH THE HOMOGENEOUS CHEMICAL VAPOR DEPOSITION TECHNIQUE.
- - J.F. Nijs
  - Jerzy Kanicki
  - et al.
- 1983
- E. C. Photovoltaic Solar Energy Conference 1983
Silicon doping of GaAs and Al_xGa_1-xAs using disilane in metalorganic chemical vapor deposition
- - T.F. Kuech
  - E. Veuhoff
  - et al.
- 1984
- Journal of Crystal Growth
The Adsorption of PH₃ on Si(100) and its Effect on the Coadsorption of SiH₄
- - Ming L. Yu
  - B.S. Meyerson
- 1984
- JVSTA
The preparation of in situ doped hydrogenated amorphous silicon by homogeneous chemical vapor deposition
- - B.S. Meyerson
  - B.A. Scott
  - et al.
- 1983
- Journal of Applied Physics
Homogeneous chemical vapor deposition of amorphous semiconductor thin films
- - B.A. Scott
  - W.L. Olbricht
  - et al.
- 1983
- Journal of Non-Crystalline Solids