Publications

34 results for C.Y. Wong

Mobile ion gettering in passivated P+ polysilicon gates
- - C.Y. Wong
  - C.C.-H. Hsu
  - et al.
- 1990
- VLSI Technology 1990
Study of boron penetration through thin oxide with p⁺-polysilicon gate
- - J.Y.-C. Sun
  - C.Y. Wong
  - et al.
- 1989
- VLSI Technology 1989
Sidewall Oxidation of Polycrystalline-Silicon Gate
- - Joseph Piccirillo
  - Arup Bhattacharyya
  - et al.
- 1989
- IEEE Electron Device Letters
Doping of n⁺ and p⁺ polysilicon in a dual-gate CMOS process
- - C.Y. Wong
  - J.Y.-C. Sun
  - et al.
- 1988
- IEDM 1988
Rapid thermal processing of arsenic-implanted polysilicon on very thin oxide
- - J.Y.-C. Sun
  - R. Angelucci
  - et al.
- 1988
- ESSDERC 1988
Chemically induced grain boundary migration in doped polycrystalline silicon films
- - K.N. Tu
  - J. Tersoff
  - et al.
- 1988
- Solid State Communications
Electrical activation of arsenic ion-implanted polycrystalline silicon by rapid thermal annealing
- - C.Y. Wong
  - Y. Komem
  - et al.
- 1987
- Applied Physics Letters
Effects of reactive ion etching on chemical vapor deposition
- - C.Y. Wong
  - P.E. Batson
- 1987
- Applied Physics Letters
Enhanced grain growth of polycrystalline silicon at low temperature by dopant redistribution
- - T.C. Chou
  - C.Y. Wong
  - et al.
- 1987
- Journal of Applied Physics
Inducing rapid epitaxy of polycrystalline silicon films deposited on 〈100〉 silicon by arsenic ion implantation
- - Y. Komem
  - C.Y. Wong
  - et al.
- 1987
- Journal of Applied Physics