Low Energy Ion Beam Etching
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 2019
- JES
Publications
6 results for H.R. Kaufman
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Induced drift currents in circular planar magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe characterization of magnetron operation
- H.R. Kaufman
- S.M. Rossnagel
- 1986
- JVSTA
Modification of thin film properties by ion bombardment during deposition
- James M.E. Harper
- Jerome J. Cuomo
- et al.
- 1985
- Nuclear Inst. and Methods in Physics Research, B