Analysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- Douglas W. Cooper
- Robert J. Miller
- 2019
- JES
Publications
8 results for R.J. Miller
Generation of submicrometer particles in dry sliding contact
- J.L. Xuan
- H.S. Cheng
- et al.
- 1990
- Journal of Tribology
Deposition of submicron aerosol particles during integrated circuit manufacturing: Theory
- Douglas W. Cooper
- Robert J. Miller
- et al.
- 1990
- Particulate Science and Technology
Surface cleaning by electrostatic removal of particles
- Douglas Cooper
- Henry Wolfe
- et al.
- 1990
- Aerosol Science and Technology
An aerosol model of particle generation during pressure reduction
- J.J. Wu
- Douglas W. Cooper
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow
- Douglas W. Cooper
- Michael H. Peters
- et al.
- 1989
- Aerosol Science and Technology
Mechanisms of contaminant particle production, migration, and adhesion
- R.J. Miller
- Douglas W. Cooper
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electromigration in gold and copper thin film conductors
- R.J. Miller
- A. Gangulee
- 1980
- Thin Solid Films