Publications

2 results for U. Gerlach-Meyer

A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- - U. Gerlach-Meyer
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
Ion-enhanced gas-surface chemistry: The influence of the mass of the incident ion
- - U. Gerlach-Meyer
  - J.W. Coburn
  - et al.
- 1981
- Surface Science