A comparative study of SIMS depth profiling of boron in silicon
- J.B. Clegg
- A.E. Morgan
- et al.
- 2004
- Surface and Interface Analysis
Publications
5 results for C.W. Magee
Silicon diffusion at polycrystalline-Si/GaAs interfaces
- K.L. Kavanagh
- J.W. Mayer
- et al.
- 1985
- Applied Physics Letters
Current-induced hydrogen migration and interface trap generation in aluminum-silicon dioxide-silicon capacitors
- F.J. Feigl
- R. Gale
- et al.
- 1984
- Nuclear Inst. and Methods in Physics Research, B
Hydrogen migration under avalanche injection of electrons in Si metal-oxide-semiconductor capacitors
- R. Gale
- F.J. Feigl
- et al.
- 1983
- Journal of Applied Physics
Profiling hydrogen in materials using ion beams
- J.F. Ziegler
- C.P. Wu
- et al.
- 1978
- Nuclear Instruments and Methods