ESCA and Mass Spectroscopic Studies of Degradations of Poly[bis(trifluoroethoxy)phosphazene]: Pyrolysis, Ultraviolet Light, and Electron Beam Induced Degradations
- Hiroyuki Hiraoka
- Wen-yaung Lee
- et al.
- 2002
- Macromolecules
Paper
Publications
5 results for L.W. Welsh Jr.
DEEP UV PHOTOLITHOGRAPHY WITH COMPOSITE PHOTORESISTS MADE OF POLY(OLEFIN SULFONES).
- H. Hiraoka
- L.W. Welsh Jr.
- 1983
- ACS National Meeting 1983
Conference paperPolymer degradation in reactive ion etching and its possible application to all dry processes
- H. Hiraoka
- L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry
PaperIn situ preparation of lithographic resists containing glutarimide groups
- Hiroyuki Hiraoka
- Edward Gipstein
- et al.
- 1978
- Journal of Applied Polymer Science
PaperExperimental observations of the negative atomic nitrogen ion
- H. Hiraoka
- R.K. Nesbet
- et al.
- 1977
- Physical Review Letters
Paper