Micromechanical light modulator array fabricated on silicon
- K.E. Petersen
- 2008
- Applied Physics Letters
Paper
Publications
6 results for K.E. Petersen
Young's modulus measurements of thin films using micromechanics
- Kurt E. Petersen
- C.R. Guarnieri
- 2008
- Journal of Applied Physics
PaperMicromechanical Accelerometer Integrated With Mos Detection Circuitry
- Kurt E. Petersen
- Anne Shartel
- et al.
- 1982
- IEEE T-ED
PaperSilicon as a Mechanical Material
- Kurt E. Petersen
- 1982
- Proceedings of the IEEE
PaperFabrication of an Integrated, Planar Silicon Ink-Jet Structure
- Kurt E. Petersen
- 1979
- IEEE T-ED
PaperIIb-8 Micromechanical Light Modulator Array Fabricated on Silicon
- K.E. Petersen
- 1977
- IEEE T-ED
Paper