William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Peter J. Price
Surface Science
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics