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Conference paper193nm single layer photoresists: Defeating tradeoffs with a new class of fluoropolymersP.R. Varanasi, R.W. Kwong, et al.Microlithography 2005
PaperStructural Study of Thermochromism in Poly(Di-n-alkylgermanes) by Raman Spectroscopy in the Visible and Near-InfraredV.M. Hallmark, C.G. Zimba, et al.Macromolecules
