Conference paper
Polysilanes: photochemistry and deep UV lithography
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
No abstract available.
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
R.D. Allen, Juliann Opitz, et al.
J. Photopolym. Sci. Tech.
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SPIE Advances in Resist Technology and Processing 1999
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J. Photopolym. Sci. Tech.