W.Ted Masselink, Thomas F. Kuech
Journal of Electronic Materials
The vapor pressures of the metal organic halogen compounds diethylgallium chloride (DEGaCI) and diethylaluminum chloride (DEAICI) have been measured by a capacitance manometer in the temperature range 5 < θ < 60 °C. The measurements for DEAICI correlate and extrapolate well to existing data in the literature. The measurements for DEGaCI replace the previous data point measured at 60 °C. The dependences of the vapor pressures of DEAICI and DEGaCI on temperature are log (PDEAICI/Torr) = 8.780 - 2815(K/T) and log (PDEGaCI/Torr) = 8.943 - 3080(K/T), respectively. The results of mass transport measurements, combined with the measured compound vapor pressures, indicate that the vapor phase of these compounds is likely to be dominated by dimers. © 1991, American Chemical Society. All rights reserved.