Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Lawrence Suchow, Norman R. Stemple
JES