Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
The authors explore the interplay between radar detection and tomographic reconstruction techniques. On the other hand, classical tomography yields an algorithm for range-velocity determination. On the other hand, radar detection gives rise to a new type of tomographic reconstruction problem.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
T. Graham, A. Afzali, et al.
Microlithography 2000