Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Chai Wah Wu
Linear Algebra and Its Applications
J. LaRue, C. Ting
Proceedings of SPIE 1989