Conference paper
Neave effect also occurs with Tausworthe sequences
Shu Tezuka
WSC 1991
No abstract available.
Shu Tezuka
WSC 1991
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sankar Basu
Journal of the Franklin Institute
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011