J.C. Marinace
JES
The use of nonflammable and nontoxic gases CF4, CF2C12, and SF6 for the reflow and bonding of Pb/Sn solder has been demonstrated. It has been found that a concentration of these gases on the order of l%~5% in a 760 Torr atmosphere of nitrogen or argon is sufficient for soldering. © 1986, American Vacuum Society. All rights reserved.
J.C. Marinace
JES
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering