Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theory of the low-energy surface Okorokov excitation is presented and a new spectroscopy is proposed in which an atomic or ionic beam in collision with the surface at grazing incidence is excited electronically by a corrugated surface potential (Okorokov excitation). By monitoring ions and excited atoms in the specularly reflected beam, information about the shift and broadening of the atomic energy levels near the surface is obtained. We demonstrate ion and excited atom spectra in a suitable model. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry