William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Lawrence Suchow, Norman R. Stemple
JES
John G. Long, Peter C. Searson, et al.
JES
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME