Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The structure of surface carbonate on Ag(110) was studied by near edge X-ray absorption fine structure. The dependence of the intensity of the C(1s) → π* and the C(1s) → σ* transitions of the carbonate on the orientation of the electric field vector of the incident light indicate that the species lies in a plane parallel to the surface. By comparison of the energy of the C(1s) → σ* transition to CdCO3 the CO bonds are found to be identical and 1.29 ± 0.04 A ̊ in length. The vibrational spectrum of this species reveals the Cs symmetry of the surface-adsorbate complex. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Kigook Song, Robert D. Miller, et al.
Macromolecules
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids