Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K-β-gallate is a potassium/gallium isomorph of the two-dimensional fast ion conductor, β-alumina. The composition, K2O·8.10Ga2O3, requires 36% excess K over that of the stoichiometric compound. The charge on this excess is compensated by interstitial oxygens in the conduction plane. The crystal exhibits a strong "mixed alkali effect" when part of the K is replaced by Na. At {reversed tilde equals}20 atom per cent Na, the conductivity at room temperature goes through a minimum about 3- 1 2 orders of magnitude lower than that expected from extrapolation between the conductivities of the single alkali end member crystals. An explanation of the effect based on site preference by the two alkali ions is proposed. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering