Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM
No abstract available.
Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004