PaperMichael Hatzakis, semiconductor industry pioneerJ. Paraszczak, J.M. Shaw, et al.Micro and Nano Engineering
PaperThe Etching of Crystallographically Determined Orifices in SapphireA. Reisman, M. Berkenblit, et al.JES
Conference paperEffects of KrF laser radiation on fused-silica glass: a comparison of samples exposed in air vs vacuumI.K. Pour, D.J. Krajnovich, et al.SPIE Optical Materials for High Average Power Lasers 1992