Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The asymptotic capacity at low input powers of an average-power limited or an average- and peak-power limited discrete-time Poisson channel is considered. For a Poisson channel whose dark current is zero or decays to zero linearly with its average input power E, capacity scales like E log 1/E for small E. For a Poisson channel whose dark current is a nonzero constant, capacity scales, to within a constant, like E log log 1/E for small E. © 2011 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
David S. Kung
DAC 1998