Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Light-induced transverse voltages in thin Mo films on Al2O3 have been studied using fast rise-time laser pulses with widths of approximately 100 nsec. Both front and back (interfacial) illumination of the film produce voltages that correlate extremely well with the time-dependent average normal temperature gradient as determined by computer simulation. These results support a thermoelectric model as the source of the voltage. © 1974.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Ming L. Yu
Physical Review B
Michiel Sprik
Journal of Physics Condensed Matter