Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The elastic contact of a plate with two axisymmetric bodies, generally of dissimilar elastic properties and curvatures, is considered. The solution of the resulting two integral equations is given as a truncated- series of Legendre polynomials of even order whose coefficients may be determined from a system of linear algebraic equations. The relationships between the total load, radii of curvature of the bodies, contact radii, approach, radial displacements, maximum contact stress, and the plate thickness can then be computed in terms of these coefficients. Numerical compulations have been carried out for the contact of a plate with two identical spheres. © 1964 by ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta