Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Hopscotch, a fast finite difference technique, is used to solve parabolic and elliptic equations in two space dimensions with a mixed derivative. The method is compared numerically with existing alternating direction implicit (A.D.I.) and locally one dimensional (L.O.D.) methods for simple problems. Douglas and Gunn's A.D.I. method is both simplified and improved by reformulating it as a hopscotch method. © 1977, All rights reserved.
J. LaRue, C. Ting
Proceedings of SPIE 1989
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Minghong Fang, Zifan Zhang, et al.
CCS 2024