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Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Let - 2 s c £ 2. In this paper we find the precise upper and lower bounds on die nth Taylor coefficient an of functions f(z) = z + cz% + akz typically real in the unit disk for n = 3, 4.In addition all the extremal functions are identified. © 1973 American Mathematical Society.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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