Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The commensurate-incommensurate transition of a system of 20,736 krypton atoms on a graphite surface is studied by molecular dynamics computer simulations. The weakly incommensurate phase consisting of commensurate regions separated by a network of incommensurate domain walls is investigated at various temperatures and coverages. At low temperatures a honeycomb structure is observed. For increasing temperatures, the domain walls are found to fluctuate more and more out of the symmetry directions. They broaden considerably and show increasing surface roughness. © 1984.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ming L. Yu
Physical Review B
A. Krol, C.J. Sher, et al.
Surface Science
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997