Strained Si NMOSFETs for high performance CMOS technology
K. Rim, S.J. Koester, et al.
VLSI Technology 2001
We report measurements of the capture barrier for the DX center in Si-doped AlxGa1-xAs as a function of the alloy composition. A model of the capture process which requires a distribution of capture barrier heights has been fit to the data for samples with x=0.35. A simple technique is used to extract the average capture barrier height from data for samples with AlAs mole fraction ranging from x=0.27 to x=0.55. The barrier height varies strongly with the composition and has a minimum at x=0.35. The implications of these results are discussed.
K. Rim, S.J. Koester, et al.
VLSI Technology 2001
L.J. Brillson, M.L. Slade, et al.
Applied Physics Letters
P.M. Mooney, T.N. Theis, et al.
Applied Physics Letters
G.M. Cohen, P.M. Mooney, et al.
Journal of Applied Physics