Naga Ayachitula, Melissa Buco, et al.
SCC 2007
No abstract available.
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009