Sung Ho Kim, Oun-Ho Park, et al.
Small
A approach to the generation of nanoporous materials using star-shaped amphiphilic copolymers that organize the organosilicate vitrificate into nanostructures was discussed. The amphiphilic copolymers were dissolved in a solution containing methyl silsesquioxane (MSSQ) prepolymer in propylene glycol monomethyl ether, and the resulting solution was spun on a silicon wafer to produce thin films that were cured to 430°C to effect network formation. It was found that a two-phase structure was clearly evident even for the low temperature cure where the MSSQ exists as a prepolymer. The results show that porous morphology was strongly dependent on the arm number, molecular weight of the interior core.
Sung Ho Kim, Oun-Ho Park, et al.
Small
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001