J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Sung Ho Kim, Oun-Ho Park, et al.
Small