Conference paper193-nm single-layer positive resists: building etch resistance into a high-resolution imaging systemR.D. Allen, G.M. Wallraff, et al.Microlithography 1995
Conference paperInvestigations on the structural morphology of sulfonium salt containing polymethacrylate filmsR.D. Allen, U. Schaedeli, et al.ACS PMSE 1989
Conference paperChemically amplified photoresist for visible laser direct imagingG.M. Wallraff, R.D. Allen, et al.ACS Spring 1991