Thomas I. Wallow, P.J. Brock, et al.
SPIE Advances in Resist Technology and Processing 1999
Thomas I. Wallow, P.J. Brock, et al.
SPIE Advances in Resist Technology and Processing 1999
R.D. Allen, G.M. Wallraff, et al.
Microlithography 1995
B. Reck, R.D. Allen, et al.
Polymer Engineering & Science
A.J. Pasquale, R.D. Allen, et al.
Macromolecules