A. Krol, C.J. Sher, et al.
Surface Science
No abstract available.
A. Krol, C.J. Sher, et al.
Surface Science
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
R. Ghez, M.B. Small
JES
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007