N.J. Clecak, R.J. Cox, et al.
Polymer Engineering & Science
No abstract available.
N.J. Clecak, R.J. Cox, et al.
Polymer Engineering & Science
Scott A. MacDonald, C.B. Larson, et al.
Microlithography 1993
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993
R.D. Miller, G.M. Wallraff, et al.
Polymer Engineering & Science