Conference paper
Polysilanes: photochemistry and deep UV lithography
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
No abstract available.
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988
R.D. Miller, G.M. Wallraff, et al.
Polymer Engineering & Science
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1992
Barbara Grant, N.J. Clecak, et al.
Journal of Organic Chemistry