T.J. Chuang, R.J. Cox, et al.
JACS
No abstract available.
T.J. Chuang, R.J. Cox, et al.
JACS
S.A. Macdonald, R.D. Allen, et al.
Proceedings of SPIE 1989
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1992
R.D. Miller, G.M. Wallraff, et al.
SPE Regional Technical Conference 1988