Qinghuang Lin, Alshakim Nelson, et al.
SPIE Advanced Lithography 2011
The relative rates of varying Nb/Nb-TBE monomer feed ratios were evaluated by using real-time monitoring via in-situ FTIR spectroscopy of alternating copolymerizations of MA with Nb and Nb-TBE. Pseudo first order kinetic plots constructed from the in-situ FTIR absorbance data indicated that the rate of reaction is a strong function of the Nb/Nb-TBE ratio and decreased with increasing Nb-TBE.
Qinghuang Lin, Alshakim Nelson, et al.
SPIE Advanced Lithography 2011
Robert D. Allen, Juliann Opitz, et al.
Microlithography 1998
Roderick R. Kunz, Robert D. Allen, et al.
Polymers for Advanced Technologies
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008