Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The swelling of microporous glasses in water was found to change as a function of the heat–treatment time and temperature required for phase separation in the original borosilicate glass (70SiO2‐23B2O3‐7Na2O (wt%)). The swelling appears to be determined primarily by the quantity of silica gel remaining in the micropores, which in turn is determined by the composition of the alkali‐borate‐rich phase of the phase‐separated glass. Copyright © 1982, Wiley Blackwell. All rights reserved
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, M.B. Small
JES
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Journal of Low Temperature Physics