P.S. Ho, M. Liehr, et al.
Surface Science
We have investigated the role of surfactant coverage and bonding for growth of Ge on Si(111). At 470°C Ge grows on Si(111)-(7×7) in a Stranski-Krastanov fashion. Preadsorption of 1-ML Ga at 500°C forms a Ga(111)-(6.3×6.3) structure and alters the Ge growth mode from three-dimensional (3D) islanding to continuous film formation. However, the epitaxial layer contains defects, caused by the presence of domain boundaries of both A- and B-type material. Growth properties depend strongly on the initial Ga coverage: if a (3×3) surface with 1/3-mL Ga is used, a modified Stranski-Krastanov growth mode is observed, with 3D islands of a uniform predominant thickness.
P.S. Ho, M. Liehr, et al.
Surface Science
R.D. Clark, S. Consiglio, et al.
ECS Meeting 2008
P. Jamison, M. Copel, et al.
MRS Spring Meeting 2006
R.P. Pezzi, R.M. Wallace, et al.
International Conference on Characterization and Metrology for ULSI Technology 2005