Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The scanning tunneling microscope (STM) is an important tool for studying the growth of ultrathin metal structures. The behavior of atoms arriving at the surface determines nanometer-scale structure that is readily measured with the STM. These structural features are important in determining properties. The variety of structural possibilities is illustrated with the difference between substrate-controlled island nucleation of Ni on Au(111) and diffussion-controlled aggregation of Ag on Au(111). The STM also provides a fairly complete picture of the intermixing that occurs in the early stages of room-temperature growth of Fe on Cu(100). © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
J.A. Barker, D. Henderson, et al.
Molecular Physics