T. Schneider, E. Stoll
Physical Review B
The surface stress, which characterizes the state of stress at the surface of a macroscopic crystal, is calculated from first principles by two methods for Mo(001) to be 3.1 mRyd bohr-2 = 2.4 J m-2. Both methods use the energy of a fully relaxed seven-layer slab as a function of the in-plane lattice parameter a. One method uses the slope and the other the curvature at particular values of a. Fully relaxed energies give surface stress values 40% smaller than partially relaxed energies which have relaxed just a single common layer spacing. The slab is divided into bulk and surface regions with different parameters. Estimates are made of the surface region parameters including its equilibrium in-plane lattice constant, its epitaxial elastic constant, its Poisson ratio for in-plane strains and its thickness.
T. Schneider, E. Stoll
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007