Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The 3× 3-Au, 3× 3-Ag, "5×5"-Cu, and 6×6-Au overlayer interfaces on Si(111) are studied with k-resolved inverse photoemission. Strong surface-state emission is observed at 2.0 eV above the Fermi level for all these surfaces, which is attributed to the local bonding between the metal atoms and the Si(111) substrate. The long-range order of the larger unit cells manifests itself as weak surface states at the Fermi level. © 1986 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Lawrence Suchow, Norman R. Stemple
JES