Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
No abstract available.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Gangulee, F.M. D'Heurle
Thin Solid Films