Fabio Carta, Stephen M. Gates, et al.
IEEE T-ED
Paper
Surface chemistry in the chemical vapor deposition of electronic materials
Abstract
No abstract available.
Related
Marcus A. Worsley, Stacey F. Bent, et al.
MRS Proceedings 2003
Chiang Chao-Ming, Stephen M. Gates, et al.
Surface Science
E. Todd Ryan, Stephen M. Gates, et al.
Journal of Applied Physics