William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
An overview of surface and interface analysis within IBM is presented. The types of materials concerned; the areas in which surface analysis is having major impact; and the relative importance of different analytical techniques are discussed, together with perspectives for the future. Selected examples from Research Division work are presented to illustrate the range of materials work and techniques involved. © 1986 Springer-Verlag.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Alnot, D.J. Auerbach, et al.
Surface Science
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
T.N. Morgan
Semiconductor Science and Technology