Polymer self assembly in semiconductor microelectronics
C.T. Black, K.W. Guarini, et al.
IEDM 2006
We have measured the effect of a depolarizing field on the properties of a ferroelectric capacitor. By systematically adjusting the amount of charge available to compensate the polarization, we can control the strength of the field inside the ferroelectric. We find that even a few percent of uncompensated polarization charge results in a significant suppression of measured ferroelectric properties, and a complete lack of compensating charge leaves a greatly reduced, although nonzero, polarization. The effect of a depolarizing field is briefly discussed in terms of proposed ferroelectric device applications. © 1997 American Institute of Physics.
C.T. Black, K.W. Guarini, et al.
IEDM 2006
K.W. Guarini, C.T. Black, et al.
Advanced Materials
C.T. Black, K.W. Guarini, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
C.T. Black, K.W. Guarini, et al.
Applied Physics Letters