William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A chemical beam epitaxy system comprising low temperature effusion cells and a source of atomic oxygen has been developed for the preparation of cuprate thin films. Superconducting, smooth and single phase c-axis La2-xBaxCuO4 thin films have been grown using Cu(piv)2, La(piv)3 and Ba(thd)2 metallorganic precursors, demonstrating the viability of this inexpensive technique. © 1994.