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A chemical beam epitaxy system comprising low temperature effusion cells and a source of atomic oxygen has been developed for the preparation of cuprate thin films. Superconducting, smooth and single phase c-axis La2-xBaxCuO4 thin films have been grown using Cu(piv)2, La(piv)3 and Ba(thd)2 metallorganic precursors, demonstrating the viability of this inexpensive technique. © 1994.
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