R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
No abstract available.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films