R. Ghez, J.S. Lew
Journal of Crystal Growth
Paper
Summary Abstract: Titanium silicide films prepared by reactive sputtering
Abstract
No abstract available.
Related
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films